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Fast Evaluation of Period Deviation and Flatness of a Linear Scale by Using a Fizeau Interferometer
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  • Fast Evaluation of Period Deviation and Flatness of a Linear Scale by Using a Fizeau Interferometer
  • Fast Evaluation of Period Deviation and Flatness of a Linear Scale by Using a Fizeau Interferometer
저자명
Kim. Woo Jae,Shimizu. Yuki,Kimura. Akihide,Gao. Wei
간행물명
International journal of precision engineering and manufacturing
권/호정보
2012년|13권 9호|pp.1517-1524 (8 pages)
발행정보
한국정밀공학회
파일정보
정기간행물|ENG|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

A reflective-type linear scale with a pitch of $1.67{mu}m$ used in an interferential scanning-type 2-DOF linear encoder is evaluated by the Fizeau interferometer with a measurement range of 100 mm. The 2-DOF linear encoder produces 2-axis position signals based on the interference between the X-directional positive and negative first-order diffracted beams from the linear scale. Firstly, the Z-directional flatness $e_Z$(x,y) of the linear scale is evaluated from the wavefront of the zero-order diffracted beam reflected from the linear scale. The linear scale is then tilted to align the axes of the first-order diffracted beams with that of the interferometer so that the X-directional period deviation eX(x,y)of the linear scale can be evaluated from the wavefronts of the X-directional positive and negative first--order diffracted beams. Finally, the Z-directional flatness $e_Z$(x,y) and X-directional period deviation $e_X$(x,y) were verified by comparing those with the nonlinear components of the 2-DOF linear encoder using the evaluated linear scale.