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서지반출
Optical Transmittance Recovery of Powder Blasted Micro Fluidic Channels on Fused Silica Glass Using MR Polishing
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  • Optical Transmittance Recovery of Powder Blasted Micro Fluidic Channels on Fused Silica Glass Using MR Polishing
  • Optical Transmittance Recovery of Powder Blasted Micro Fluidic Channels on Fused Silica Glass Using MR Polishing
저자명
Lee. Jung-Won,Cho. Yong-Kyu,Cho. Myeong-Woo,Kim. Gun-Hee,Je. Tae-Jin
간행물명
International journal of precision engineering and manufacturing
권/호정보
2012년|13권 11호|pp.1925-1930 (6 pages)
발행정보
한국정밀공학회
파일정보
정기간행물|ENG|
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기타
이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

An ultra-precision polishing method using magnetorheological (MR) fluids is applied to the powder blasted micro channels fabricated on fused silica glass to improve surface quality and recover optical transmittance. For the experiments, 300 ${mu}m$ micro channels with 600 ${mu}m$ square reservoirs were fabricated on the glass; then, a series of MR polishing were performed. The surface roughness and transmittance of the micro channels rapidly improved after 20 minutes MR polishing. The Measured surface roughness of the final specimen was Ra = 2.2 nm, and transmittance was 99.38% (at wavelength = 1600 nm) of the original specimen. The results of this research confirm that the MR polishing can be a very effective method to improve surface roughness and transmittance by polishing the micro channels on fused silica glass.