In this paper, a novel planar type magnetic levitation system without other assistant devices is proposed and it can move with 6 degree of freedom (X, Y, Z, ${ heta}_X$, ${ heta}_Y$, ${ heta}_Z$) in wafer size as well as in nano scale positioning.The mover is composed with 2-D Halbach permanent magnet array and the stator is composed with $10{ imes}10$ coil arrays.It was composed in laboratory and tested with short stroke (4 [mm]) and long stroke (160 [mm])movements. The errors of short movement test is [X, Y, Z, ${ heta}_X$, ${ heta}_Y$, ${ heta}_Z$]${leq}$ [${pm}200nm$, ${pm}200nm$, ${pm}250nm$, ${pm}3urad$, ${pm}2urad$, ${pm}1urad$]The errors of long stroke movement test is [X, Y, Z, ${ heta}_X$, ${ heta}_Y$, ${ heta}_Z$]${leq}$ [${pm}200nm$, ${pm}200nm$, ${pm}250nm$, ${pm}1.5urad$, ${pm}2urad$, ${pm}0.5urad$].