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Highly transparent and resistive nanocrystalline ZnO-SnO2 films prepared by rf magnetron sputtering
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  • Highly transparent and resistive nanocrystalline ZnO-SnO2 films prepared by rf magnetron sputtering
  • Highly transparent and resistive nanocrystalline ZnO-SnO2 films prepared by rf magnetron sputtering
저자명
Cha. Chun-Nam,Choi. Mu-Hee,Ma. Tae-Young
간행물명
Journal of electrical engineering & technology
권/호정보
2012년|7권 4호|pp.596-600 (5 pages)
발행정보
대한전기학회
파일정보
정기간행물|ENG|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

ZnO-$SnO_2$ films were deposited by rf magnetron sputtering using a ZnO-$SnO_2$ (2:1 molar ratio) target. The target was made from a mixture of ZnO and $SnO_2$ powders calcined at $800^{circ}C$. The working pressure was 1 mTorr, and the rf power was 120 W. The ratio of oxygen to argon ($O_2$:Ar) was varied from 0% to 10%, and the substrate temperature was varied from $27^{circ}C$ to $300^{circ}C$. The crystallographic properties and the surface morphologies of the films were studied by X-ray diffraction (XRD), scanning electron microscopy (SEM), and atomic force spectroscopy (AFM). The ZnO-$SnO_2$ films deposited in $O_2$:Ar = 10% exhibited resistivity higher than $10^6{Omega}cm$ and transmittance of more than 80% in the visible range.