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미세금형 가공을 위한 전기화학식각 공정의 유한요소 해석 및 실험결과 비교
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  • 미세금형 가공을 위한 전기화학식각 공정의 유한요소 해석 및 실험결과 비교
저자명
류헌열,임현승,조시형,황병준,이성호,박진구,Ryu. Heon-Yul,Im. Hyeon-Seung,Cho. Si-Hyeong,Hwang. Byeong-Jun,Lee. Sung-Ho,Park. Jin-Goo
간행물명
한국재료학회지
권/호정보
2012년|22권 9호|pp.482-488 (7 pages)
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한국재료학회
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정기간행물|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

To fabricate a precise micro metal mold, the electrochemical etching process has been researched. We investigated the electrochemical etching process numerically and experimentally to determine the etching tendency of the process, focusing on the current density, which is a major parameter of the process. The finite element method, a kind of numerical analysis, was used to determine the current density distribution on the workpiece. Stainless steel(SS304) substrate with various sized square and circular array patterns as an anode and copper(Cu) plate as a cathode were used for the electrochemical experiments. A mixture of $H_2SO_4$, $H_3PO_4$, and DIW was used as an electrolyte. In this paper, comparison of the results from the experiment and the numerical simulation is presented, including the current density distribution and line profile from the simulation, and the etching profile and surface morphology from the experiment. Etching profile and surface morphology were characterized using a 3D-profiler and FE-SEM measurement. From a comparison of the data, it was confirmed that the current density distribution and the line profile of the simulation were similar to the surface morphology and the etching profile of the experiment, respectively. The current density is more concentrated at the vertex of the square pattern and circumference of the circular pattern. And, the depth of the etched area is proportional to the current density.