- 열처리 조건에 따른 3C-SiC 박막을 이용한 그래핀 합성
- ㆍ 저자명
- 김강산,정귀상,Kim. Kang-San,Chung. Gwiy-Sang
- ㆍ 간행물명
- Journal of sensor science and technology
- ㆍ 권/호정보
- 2012년|21권 5호|pp.385-388 (4 pages)
- ㆍ 발행정보
- 한국센서학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
This paper describes the synthesis and characterization of graphene by RTA process. Amorphous 3C-SiC were deposited using APCVD for carbon source and Ni layer were employed for transition layer. Various parameters of the ramping speed, the annealing time and the cooling speed are evaluated for the optimized combination allowed for the reproducible fabrication of graphene using 3C-SiC thin film. For analysis of crystalline Raman spectra was employed. Transferred graphene shows a high IG/ID ratio of 2.73. SEM and TEM images show the optical transparency and 6 carbon network, respectively. Au electrode deposited on the transferred graphene shows linear I-V curve and its resistance is 358 ${Omega}$.