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A Digital Readout IC with Digital Offset Canceller for Capacitive Sensors
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  • A Digital Readout IC with Digital Offset Canceller for Capacitive Sensors
  • A Digital Readout IC with Digital Offset Canceller for Capacitive Sensors
저자명
Lim. Dong-Hyuk,Lee. Sang-Yoon,Choi. Woo-Seok,Park. Jun-Eun,Jeong. Deog-Kyoon
간행물명
Journal of semiconductor technology and science
권/호정보
2012년|12권 3호|pp.278-285 (8 pages)
발행정보
대한전자공학회
파일정보
정기간행물|ENG|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

A digital readout IC for capacitive sensors is presented. Digital capacitance readout circuits suffer from static capacitance of sensors, especially single-ended sensors, and require large passive elements to cancel such DC offset signal. For this reason, to maximize a dynamic range with a small die area, the proposed circuit features digital filters having a coarse and fine compensation steps. Moreover, by employing switched-capacitor circuit for the front-end, correlated double sampling (CDS) technique can be adopted to minimize low-frequency device noise. The proposed circuit targeted 8-kHz signal bandwidth and oversampling ratio (OSR) of 64, thus a $3^{rd}$-order ${Delta}{Sigma}$ modulator operating at 1 MH was used for pulse-density-modulated (PDM) output. The proposed IC was designed in a 0.18-${mu}m$ CMOS mixed-mode process, and occupied $0.86{ imes}1.33mm^2$. The measurement results shows suppressed DC power under about -30 dBFS with minimized device flicker noise.