- 디스플레이 패널에 집적이 가능한 적외선 포토센서
- ㆍ 저자명
- 전호식,허양욱,이재표,한상윤,배병성,Jeon. Ho-Sik,Heo. Yang-Wook,Lee. Jae-Pyo,Han. Sang-Youn,Bae. Byung-Seong
- ㆍ 간행물명
- 한국정밀공학회지
- ㆍ 권/호정보
- 2012년|29권 11호|pp.1164-1169 (6 pages)
- ㆍ 발행정보
- 한국정밀공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
This paper presents a study of an integrated infrared (IR) photo sensor for display application. We fabricated hydrogenated amorphous silicon thin film transistor (a-Si:H TFT) and hydrogenated amorphous silicon germanium thin film transistor (a-SiGe:H TFT) which were bottom gate structure. We investigated the dependence of a-SiGe:H TFT characteristics on incident wavelengths. We proposed photo sensor which responded to wavelengths of IR region. Proposed pixel circuit of photo sensor was consists of switch TFT and photo TFT, and one capacitor. We developed integrated photo sensor circuit and investigated the performance of the proposed sensor circuit according to the input wavelengths. The developed photo sensor circuit with a-SiGe:H TFT was suitable for IR.