- 스퍼터링에 의해 제조된 SnO 박막의 RF 파워에 따른 특성 연구
- ㆍ 저자명
- 엄요셉,노병민,김성동,김사라은경,Um. Joseph,Roh. Byeong-Min,Kim. Sungdong,Kim. Sarah Eunkyung
- ㆍ 간행물명
- 한국세라믹학회지
- ㆍ 권/호정보
- 2012년|49권 5호|pp.399-403 (5 pages)
- ㆍ 발행정보
- 한국세라믹학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
SnO thin films were fabricated by rf reactive sputtering on borosilicate substrates with an Sn target and Ar/$O_2$ gas mixture. The effect of rf power on the structural, electrical, and optical properties of SnO thin films was investigated with XRD, AFM, SEM, Hall effect measurements, and UV-Vis spectrometer. As a plasma power increased the crystallinity with a preferred orientation of SnO thin films was improved and the grain size slightly increased. However the grains were coalesced and excessively irregular in shape. The electrical conductivity of SnO thin films demonstrated a relatively low p-type conductivity of 0.024 $(Wcm)^{-1}$ at a higher power condition. Lastly, SnO thin films had poor optical transmittance in the visible range as a plasma power increased.