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Detecting Digital Micromirror Device Malfunctions in High-throughput Maskless Lithography
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  • Detecting Digital Micromirror Device Malfunctions in High-throughput Maskless Lithography
  • Detecting Digital Micromirror Device Malfunctions in High-throughput Maskless Lithography
저자명
Kang. Minwook,Kang. Dong Won,Hahn. Jae W.
간행물명
Journal of the Optical Society of Korea
권/호정보
2013년|17권 6호|pp.513-517 (5 pages)
발행정보
한국광학회
파일정보
정기간행물|ENG|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
서지반출

기타언어초록

Recently, maskless lithography (ML) systems have become popular in digital manufacturing technologies. To achieve high-throughput manufacturing processes, digital micromirror devices (DMD) in ML systems must be driven to their operational limits, often in harsh conditions. We propose an instrument and algorithm to detect DMD malfunctions to ensure perfect mask image transfer to the photoresist in ML systems. DMD malfunctions are caused by either bad DMD pixels or data transfer errors. We detect bad DMD pixels with $20{ imes}20$ pixel by white and black image tests. To analyze data transfer errors at high frame rates, we monitor changes in the frame rate of a target DMD pixel driven by the input data with a set frame rate of up to 28000 frames per second (fps). For our data transfer error detection method, we verified that there are no data transfer errors in the test by confirming the agreement between the input frame rate and the output frame rate within the measurement accuracy of 1 fps.