- 능동 폴리머 펜 어래이를 이용한 미세 패터닝
- ㆍ 저자명
- 한윤수,홍지화,Han. Yoonsoo,Hong. Jihwa
- ㆍ 간행물명
- 전기전자재료학회논문지
- ㆍ 권/호정보
- 2013년|26권 12호|pp.853-857 (5 pages)
- ㆍ 발행정보
- 한국전기전자재료학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
We design, develope and test a parallel active polymer pen lithography (PPL) device, which consists of individually addressable elastomeric probe tips. The PPL array chip is fabricated using soft lithography method with polydimethylsiloxane (PDMS) material. Individual probe can be pneumatically actuated via a computer controlled interface. We demonstrate parallel writing with 16 individually addressed pens, with each pen producing a different pattern in the same run. The largest proof-of-concept array fabricated is $4{ imes}4$ with a spacing of $250{mu}m$ in both x and y axes.