Lead zirconate titanate (PZT) thick films with a thickness of $10-20{mu}m$ were fabricated on silicone substrates using an aerosol deposition method. The starting powder, which had diameters of $1-2{mu}m$, was observed using SEM. The average diameter ($d_{50}$) was $1.1{mu}m$. An XRD analysis showed a typical perovskite structure, a mixture of the tetragonal phase and rhombohedral phase. The as-deposited film with nano-sized grains had a fairly dense microstructure without any cracks. The deposited film showed a mixture of an amorphous phase and a very fine crystalline phase by diffraction pattern analysis using TEM. The as-deposited films on silicon were annealed at a temperature of $700^{circ}C$. A 20-${mu}m$ thick PZT film was torn out as a result of the high compressive stress between the PZT film and substrate.