High precision machining technology has become one of the important parts in the development of a precision machine. Such a machine requires high precision positioning as well as high speed on a large workspace. For machining systems having a high precision positioning with a long stroke, it is necessary to examine the repeatability of reference position decision. Though ball-screw driven linear stages equipped linear scale have high precision feed drivers and a long stroke, they have some limitations for reference position decision if they have not equipped the accurate home sensor. This study is performed to experimentally examine the repeatability for home position decision of a magnetic sensor as a home switch of ball-screw driven linear stage by using capacitance probe.