AVI (Automatic Vision Inspection) systems automatically detect defect features and measure their sizes via camera vision. AVI systems usually report different measurements on the same defect with some variations on position or rotation mainly because different images are provided. This is caused by possible variations from the image acquisition process including optical factors, nonuniform illumination, random noises, and so on. For this reason, conventional area based defect measuring methods have problems of robustness and consistency. In this paper, we propose a new defect size measuring method to overcome this problem, utilizing volume information that is completely ignored in the area based defect measuring method. The results show that our proposed method dramatically improves the robustness and consistency of defect size measurement.