- 참조패턴 기반의 2차원 변위 측정 방법론
- ㆍ 저자명
- 정광석,이상헌,박성준,Jung. Kwang Suk,Lee. Sang Heon,Park. Sung-Jun
- ㆍ 간행물명
- 한국생산제조시스템학회지
- ㆍ 권/호정보
- 2013년|22권 1호|pp.77-84 (8 pages)
- ㆍ 발행정보
- 한국생산제조시스템학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
In this paper, we review two-dimensional measuring methods referring to target patterns. The patterns consist of two linearly-repeated patterns or is designed repeatedly in two-dimension. The repeated properties are reflectivity, refractivity, air-gapping distance, capacitance, magnetic reluctance, electrical resistance and sloping gradient, etc. However, the optical methods are generally used for high speed processing and density, and their encoding principles are treated here. In case of two-dimensional pattern, as there is not inherently error between single units encoding the pattern except for the metrology frame errors, the end-effector position of an object accompanying the pattern can be measured with respect of the global frame without via error. Therefore, it is regarded as a substitute for laser interferometer with severe environmental constraints and has been applied to the high-accurate planar actuator.