- AlN Based RF MEMS Tunable Capacitor with Air-Suspended Electrode with Two Stages
- AlN Based RF MEMS Tunable Capacitor with Air-Suspended Electrode with Two Stages
- ㆍ 저자명
- Cheon. Seong J.,Jang. Woo J.,Park. Hyeon S.,Yoon. Min K.,Park. Jae Y.
- ㆍ 간행물명
- Journal of semiconductor technology and science
- ㆍ 권/호정보
- 2013년|13권 1호|pp.15-21 (7 pages)
- ㆍ 발행정보
- 대한전자공학회
- ㆍ 파일정보
- 정기간행물|ENG| PDF텍스트
- ㆍ 주제분야
- 기타
