In this paper, the parameter identification for localization scheme for the optics-based micro sensor node is conducted. We analyzed short measurement range problem which can be occurred in optical based micro sensor node localization method using a time of flight. And we set up the theory for distance and maximum reflected laser power to overcome the problem by identifying hardware parameters like laser power, effective area of MEMS CCR, sensitivity of photodetector, and so on. Experimental results of measurement of maximum reflected laser power were compared with results of the theory. By using the theory, we can identify hardware parameters of localization scheme to measure particular position of the optics-based micro sensor node.