In this paper, the performance analysis of optics-based sensor node localization using ToF (Time of Flight) scheme is conducted. Generally, the position of the sensor node is calculated on the base station. And the base station scans neighboring sensor nodes with a laser. The laser which is reflected from one sensor node, however, can be reached to the base station at different angles according to the scanning resolution. This means that the error of the reached angle can increase and one node may be recognized as different nodes. Also the power of laser can decrease because the laser signal spread. Thus the sensor node which is located at a long distance from the base station cannot be detected. In order to overcome these problems which can be occurred in localization using ToF, the beam spot, the scanning resolution, the size of reflector and the power of laser at the sensor node were analyzed. It can be expected that the consequence of analysis can be provided in acquisition of accurate position of sensor node and construction of optics-based sensor node localization system.