Automatic inspection system is required for increment of copper plate production and demand expansion. Thus 3D surface form and defect detection of copper plate calls for 3D image and GUI analysis. Limitation of 2D analysis, such as error occurrence and decision difficulty makes eye inspection automatic. Automatic inspection is able to raise accurate inspection rate and productivity efficiency elevation. In this paper defect classification is defined and inspection system is implemented. Defect analysis algorithms and GUI for 3D image analysis is developed and tested.