본 논문에서는 압전단결정으로 구성된 $64{ imes}8$ 채널 1.75D 초음파 트랜스듀서의 설계, 제작 및 평가를 하였다. 우선, 평면 배열된 독립소자에 전기적 연결이 가능한 트랜스듀서의 구조를 선정하고 구조에 맞게 구성소자를 제작하였다. 그리고 유한요소 해석을 통해 트랜스듀서의 세부 구조를 설계하였다. 트랜스듀서의 주요 성능요소로서, 치폭의 너비와 재료를 조절하여 소자간 상호간섭의 영향을 줄이고, 압전단결정 및 정합층의 최적 두께를 설계함으로써 트랜스듀서의 원하는 대역폭을 구현하였다. 설계에 맞게 트랜스듀서 시편을 제작하고 실험적으로 그 특성을 측정한 후, 그 결과를 유한요소 해석 결과와 비교함으로써 개발된 트랜스듀서의 성능을 평가하였다.
In this paper, a $64{ imes}8$ channel 1.75D ultrasonic transducer made of piezoelectric single crystals was designed, fabricated, and evaluated. First, a structure of the transducer was selected to be suitable for wiring on a planar array, and components were fabricated to correspond to the structure. Detailed structure of the transducer was designed through finite element analyses. As main performance factors, the crosstalk between neighboring elements was reduced through the control of kerf width and material, and desired frequency bandwidth of the transducer was achieved by designing the optimal thicknesses of the piezoelectric single crystal and matching layers. An experimental prototype of the transducer was fabricated following the design, and its performance was measured. Then the experimental results were compared with those of the finite element analysis, which led to the evaluation of the transducer developed in this work.
