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Optimal Conditions of SU-8 Mask for Micro-Abrasive Jet Machining of 3-D Freeform Brittle Materials
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  • Optimal Conditions of SU-8 Mask for Micro-Abrasive Jet Machining of 3-D Freeform Brittle Materials
  • Optimal Conditions of SU-8 Mask for Micro-Abrasive Jet Machining of 3-D Freeform Brittle Materials
저자명
Byiringiro. Jean Bosco,Ko. Tae Jo,Kim. Ho-Chan,Lee. In Hwan
간행물명
International journal of precision engineering and manufacturing
권/호정보
2013년|14권 11호|pp.1989-1996 (8 pages)
발행정보
한국정밀공학회
파일정보
정기간행물|ENG|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

Micro-abrasive jet machining (AJM), also called micro-blasting, is a mainstream machining process that uses abrasive particles for difficult-to-cut workpieces such as glass, carbides, and ceramics. During the micro-blasting process, non-machined areas are covered by a protective mask. Today, either mask fabrication practice or micro-blasting process is well suited and optimized for producing micro-features on planar workpieces. However, the demand for micro-features on three-dimensional (3-D) freeform substrates in micro electro-mechanical systems (MEMS) and lab-on-a-chip devices requires more refined non-planar micro-manufacturing techniques. We focused on devising an appropriate photoresist mask required by micro-AJM processes on the surface of a 3-D freeform workpiece. Fundamental erosion mechanisms based on SU-8 mask properties (hardness, surface roughness, and thickness) were investigated. The optimal conditions were found at an ultraviolet (UV) energy of $12.0752{mu}J/{mu}m$, focus ratio of 4.8341, and hard baking time of 8.4974 min. Under these settings, the mask hardness and surface roughness were 25.04 HV and $1.14{mu}m$, respectively. The reliability of the fabricated mask was verified through a micro-AJM process. With existing plant conditions, the engraved microfeature dimensions on the surface of a 3-D freeform workpiece were $535.3{mu}m$ (width) and $11.6{mu}m$ (depth).