Equivalent series impedance of high-voltage pulsed power capacitor is one of the important electrical characteristics both for users and for capacitor manufacturers because it may have serious effects on the performance of pulse forming circuits. In this paper, definition of equivalent series impedance and factors which generate equivalent series impedance are reviewed. Theoretical analysis for the calculation of equivalent series impedance based on differential measurement method is described and calculation program has been developed. In order to acquire data which are necessary to calculate equivalent series impedance from discharging current waveform, charging-dischargig controller has been manufactured. Measurement results of equivalent series impedance for high voltage pulsed power capacitor have been given.