- 단결정 실리콘 써모파일을 이용한 접촉형 온도센서 개발
- ㆍ 저자명
- 이영태,이유나,이왕훈,Lee. Young-Tae,Lee. You-Na,Lee. Wang-Hoon
- ㆍ 간행물명
- Journal of sensor science and technology
- ㆍ 권/호정보
- 2013년|22권 5호|pp.369-373 (5 pages)
- ㆍ 발행정보
- 한국센서학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
In this paper, we developed contact type temperature sensor with single crystal silicon strip thermopile. This sensor consists of 15 p-type single crystal silicon strips, 17 n-types and contact electrodes on silicon dioxide silicon membrane. The result of electromotive force measuring showed very good characteristic as $15.18mV/^{circ}C$ when temperature difference between the two ends of the thermopile occurs by applying thermal contact on the thermopile which was fabricated with silicon strip of $200{mu}m$ length, $20{mu}m$ width, $1{mu}m$ thickness.