- 스핀 코팅에서의 액막의 흐름
- The Flow of a Liquid Film on Spin Coating
- ㆍ 저자명
- 김태성,Kim. Tae-sung
- ㆍ 간행물명
- 한국액체미립화학회지
- ㆍ 권/호정보
- 2013년|18권 3호|pp.146-154 (9 pages)
- ㆍ 발행정보
- 한국액체미립화학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
The flow of a liquid film on spin coating is investigated in the case that the fixed volume of a liquid is placed on the center of a stationary disk. Thin film equations that are well approximated when the characteristic length in the vertical direction is much smaller than that in the radial direction (${varepsilon}{ll}1$) and have already been proposed in the work of T.-S. Kim & M.-U. Kim (2009), are used. The differential equation that governs the free surface of a liquid when ${varepsilon}{ll}1$ and ${varepsilon}Re{ll}1$ is also derived. The basic flow is analyzed using the thin film equations and their results are compared to the results of Navier-Stokes equations.