- 초정밀 유정압 베어링 이송 테이블의 나노미터 위치결정 제어에 관한 연구
- ㆍ 저자명
- 심종엽,박천홍,송창규,Shim. Jongyoup,Park. Chun-Hong,Song. Chang-Kyu
- ㆍ 간행물명
- 한국정밀공학회지
- ㆍ 권/호정보
- 2013년|30권 12호|pp.1313-1320 (8 pages)
- ㆍ 발행정보
- 한국정밀공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
An ultraprecision multi-axis machine tool has been designed and developed in our laboratory. The machine tool has four moving axes which are composed of three linear axes and one rotational axis. It has a gantry type structure and the Z-axis is on the X-axis and the C-axis, on which a workpiece is located, is inside the Y-axis. This paper shows control performance improving method and procedure for the ultra-precision positioning control of a hydrostatic bearing guided linear axis. Through improvements of electrical and mechanical components for the control system such as control electronics and oil pumping systems, the control disturbing noise is decreased. Also by the frequency domain analysis of control system those problem-making system components are identified and modified with analytical methods. The controller is analyzed and designed from frequency domain data and system information. In the experimental control results the nanometer order control result is successfully presented.