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서지반출
Design and Fabrication of Multi-Focusing Microlens Array with Different Numerical Apertures by using Thermal Reflow Method
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  • Design and Fabrication of Multi-Focusing Microlens Array with Different Numerical Apertures by using Thermal Reflow Method
  • Design and Fabrication of Multi-Focusing Microlens Array with Different Numerical Apertures by using Thermal Reflow Method
저자명
Park. Min-Kyu,Lee. Ho Jun,Park. Ji-Sub,Kim. Mugeon,Bae. Jeong Min,Mahmud. Imtiaz,Kim. Hak-Rin
간행물명
Journal of the Optical Society of Korea
권/호정보
2014년|18권 1호|pp.71-77 (7 pages)
발행정보
한국광학회
파일정보
정기간행물|ENG|
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기타
이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
서지반출

기타언어초록

We present design and fabrication of a multi-focusing microlens array (MLA) using a thermal reflow method. To obtain multi-focusing properties with different numerical apertures at the elemental lens of the MLA, double-cylinder photoresist (PR) structures with different diameters were made within the guiding pattern with both photolithographic and partial developing processes. Due to the base PR layer supporting the thermal reflow process and the guiding structure, the thermally reflowed PR structure had different radii of curvatures with lens shapes that could be precisely modeled by the initial volume of the double-cylinder PR structures. Using the PR template, the hexagonally packed multi-focusing MLA was made via the replica molding method, which showed four different focal lengths of 0.9 mm, 1.1 mm, 1.6 mm, and 2.5 mm, and four different numerical apertures of 0.1799, 0.2783, 0.3973, and 0.4775.