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Single Magnetic Bead Detection in a Microfluidic Chip Using Planar Hall Effect Sensor
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  • Single Magnetic Bead Detection in a Microfluidic Chip Using Planar Hall Effect Sensor
  • Single Magnetic Bead Detection in a Microfluidic Chip Using Planar Hall Effect Sensor
저자명
Kim. Hyuntai,Reddy. Venu,Kim. Kun Woo,Jeong. Ilgyo,Hu. Xing Hao,Kim. CheolGi
간행물명
Journal of magnetics
권/호정보
2014년|19권 1호|pp.10-14 (5 pages)
발행정보
한국자기학회
파일정보
정기간행물|ENG|
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기타
이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

In this study, we fabricate an integrated microfluidic chip with a planar Hall effect (PHE) sensor for single magnetic bead detection. The PHE sensor was constructed with a junction size of $10{mu}m{ imes}10{mu}m$ using a trilayer structure of Ta(3 nm)/NiFe(10 nm)/Cu(1.2 nm)/IrMn(10 nm)/Ta(3 nm). The sensitivity of the PHE sensor was 19.86 ${mu}V/Oe$. A diameter of 8.18 ${mu}m$ magnetic beads was used, of which the saturation magnetization was ~2.1 emu/g. The magnetic susceptibility ${chi}$ of these magnetic beads was calculated to be ~0.14. The diluted magnetic beads solution was introduced to the microfluidic channel attributing a single bead flow and simultaneously the PHE sensor voltage was measured to be 0.35 ${mu}V$. The integrated microchip was able to detect a magnetic moment of $1.98{ imes}10^{-10}$ emu.