The intentional buckling design of micro-films has various potential applications in engineering. The buckling amplitude and critical strain of micro-films are the crucial parameters for the buckling design. In the reported studies, the film parameters were regarded as deterministic. However, the geometrical and physical parameters uncertainty of micro-films due to manufacturing becomes prominent and needs to be considered. In the present paper, the probabilistic nonlinear buckling analysis of micro-films with uncertain parameters is proposed for design accuracy and reliability. The nonlinear differential equation and its asymptotic solution for the buckling micro-film with nominal parameters are firstly established. The mean values, standard deviations and variation coefficients of the buckling amplitude and critical strain are calculated by using the probability densities of uncertain parameters such as the film span length, thickness, elastic modulus and compressive force, to reveal the effects of the film parameter uncertainty on the buckling deformation. The results obtained illustrate the probabilistic relation between buckling deformation and uncertain parameters, and are useful for accurate and reliable buckling design in terms of probability.