- Zinc Tin Oxide 투명 박막트랜지스터의 특성에 미치는 활성층 두께의 영향
- ㆍ 저자명
- 마대영,Ma. Tae Young
- ㆍ 간행물명
- 전기전자재료학회논문지
- ㆍ 권/호정보
- 2014년|27권 7호|pp.433-437 (5 pages)
- ㆍ 발행정보
- 한국전기전자재료학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
Transparent thin film transistors were fabricated on $n^+$-Si wafers coated by $Al_2O_3/SiO_2$. Zinc tin oxide (ZTO) films deposited by rf magnetron sputtering were employed for active layers. The mobility (${mu}s$), threshold voltage ($V_T$), and subthreshold swing (SS) dependances on ZTO thickness were analyzed. The $V_T$ decreased with increasing ZTO thickness. The ${mu}s$ raised from $5.1cm^2/Vsec$ to $27.0cm^2/Vsec$ by increasing ZTO thickness from 7 nm to 12 nm, and then decreased with ZTO thickness above 12 nm. The SS was proportional to ZTO thickness.