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Analysis of the Capacitive Pressure Sensor with Ring Mesa Structure
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  • Analysis of the Capacitive Pressure Sensor with Ring Mesa Structure
  • Analysis of the Capacitive Pressure Sensor with Ring Mesa Structure
저자명
Kwon. Soon-Kwan,Cho. Hee-Chan,Yi. Seung-Hwan
간행물명
International journal of precision engineering and manufacturing
권/호정보
2014년|15권 6호|pp.1023-1028 (6 pages)
발행정보
한국정밀공학회
파일정보
정기간행물|ENG|
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기타
이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

The capacitive pressure sensor with ring mesa structure has been simulated and fabricated in order to replace the bulky and inaccurate mechanical pressure sensor which is currently used in laundry machines. A ring mesa structure has been adopted with the same $100{mu}m$ width and positioned at $250{mu}m$ distance from the substrate with $50{mu}m$ distance. The center displacement of diaphragm were measured with a good linearity and increased from $0.408{mu}m$ (M 6025) to $1.578{mu}m$ (M 6045) depending on the location of ring mesa structure with the same circular radius of diaphragm. When the ring mesa structure is located $250{mu}m$ distance from the substrate, the simulated capacitance according to the water pressure showed a good linearity with less than 1.3% best-fit nonlinearity error. However, as the location of ring mesa moved to the center of diaphragm, the characteristic curves of capacitance has been changed from quasi-linear to nonlinear curves with the best-fit nonlinearity errors, 3.8% (M 6030) and 11.2% (M 6035), respectively. Based upon the simulation and experiments, one candidate device has been chosen and will replace the current bulky sensor in the near future.