- 압력과 온도측정 기능을 갖는 고성능 플렉시블 촉각센서
- ㆍ 저자명
- 장진석,강태형,송한욱,박연규,김민석,Jang. Jin-Seok,Kang. Tae-Hyung,Song. Han-Wook,Park. Yon-Kyu,Kim. Min-Seok
- ㆍ 간행물명
- 한국정밀공학회지
- ㆍ 권/호정보
- 2014년|31권 8호|pp.683-688 (6 pages)
- ㆍ 발행정보
- 한국정밀공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
This paper presents a high-performance flexible tactile sensor based on inorganic silicon flexible electronics. We created 100 nm-thick semiconducting silicon ribbons equally distributed with 1 mm spacing and $8{ imes}8$ arrays to sense the pressure distribution with high-sensitivity and repeatability. The organic silicon rubber substrate was used as a spring material to achieve both of mechanical flexibility and robustness. A thin copper layer was deposited and patterned on top of the pressure sensing layer to create a flexible temperature sensing layer. The fabricated tactile sensor was tested through a series of experiments. The results showed that the tactile sensor is capable of measuring pressure and temperature simultaneously and independently with high precision.