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Influence of ZnO Thickness on the Optical and Electrical Properties of GZO/ZnO Bi-layered Films
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  • Influence of ZnO Thickness on the Optical and Electrical Properties of GZO/ZnO Bi-layered Films
  • Influence of ZnO Thickness on the Optical and Electrical Properties of GZO/ZnO Bi-layered Films
저자명
Kim. Sun-Kyung,Kim. So-Young,Kim. Seung-Hong,Jeon. Jae-Hyun,Gong. Tae-Kyung,Kim. Daeil,Yoon. Dae Young,Choi. Dong Yong
간행물명
Transactions on electrical and electronic materials
권/호정보
2014년|15권 4호|pp.198-200 (3 pages)
발행정보
한국전기전자재료학회
파일정보
정기간행물|ENG|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

100 nm thick Ga doped ZnO (GZO) thin films were deposited with RF magnetron sputtering on polyethylene terephthalate (PET) and ZnO coated PET substrate and then the effect of the ZnO thickness on the optical and electrical properties of the GZO films was investigated. GZO single layer films had an optical transmittance of 83.7% in the visible wavelength region and a sheet resistance of $2.41{Omega}/{square}$, while the optical and electrical properties of the GZO/ZnO bi-layered films were influenced by the thickness of the ZnO buffer layer. GZO films with a 20 nm thick ZnO buffer layer showed a lower sheet resistance of $1.45{Omega}/{square}$ and an optical transmittance of 85.9%. As the thickness of ZnO buffer layer in GZO/ZnO bi-layered films increased, both the conductivity and optical transmittance in the visible wavelength region were increased. Based on the figure of merit (FOM), it can be concluded that the ZnO buffer layer effectively increases the optical and electrical performance of GZO films as a transparent and conducting electrode without intentional substrate heating or a post deposition annealing process.