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Performance Test and Evaluations of a MEMS Microphone for the Hearing Impaired
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  • Performance Test and Evaluations of a MEMS Microphone for the Hearing Impaired
  • Performance Test and Evaluations of a MEMS Microphone for the Hearing Impaired
저자명
Kwak. Jun-Hyuk,Kang. Hanmi,Lee. YoungHwa,Jung. Youngdo,Kim. Jin-Hwan,Hur. Shin
간행물명
Journal of sensor science and technology
권/호정보
2014년|23권 5호|pp.326-331 (6 pages)
발행정보
한국센서학회
파일정보
정기간행물|ENG|
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기타
이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

In this study, a MEMS microphone that uses $Si_3N_4$ as the vibration membrane was produced for application as an auditory device using a sound visualization technique (sound visualization) for the hearing impaired. Two sheets of 6-inch silicon wafer were each fabricated into a vibration membrane and back plate, after which, wafer bonding was performed. A certain amount of charge was created between the bonded vibration membrane and the back plate electrodes, and a MEMS microphone that functioned through the capacitive method that uses change in such charge was fabricated. In order to evaluate the characteristics of the prepared MEMS microphone, the frequency flatness, frequency response, properties of phase between samples, and directivity according to the direction of sound source were analyzed. The MEMS microphone showed excellent flatness per frequency in the audio frequency (100 Hz-10 kHz) and a high response of at least -42 dB (sound pressure level). Further, a stable differential phase between the samples of within -3 dB was observed between 100 Hz-6 kHz. In particular, excellent omnidirectional properties were demonstrated in the frequency range of 125 Hz-4 kHz.