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Modelling and Measurements of Normal and Lateral Stiffness for Atomic Force Microscopy
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  • Modelling and Measurements of Normal and Lateral Stiffness for Atomic Force Microscopy
  • Modelling and Measurements of Normal and Lateral Stiffness for Atomic Force Microscopy
저자명
Choi. Jinnil
간행물명
Applied science and convergence technology
권/호정보
2014년|23권 5호|pp.240-247 (8 pages)
발행정보
한국진공학회
파일정보
정기간행물|ENG|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

Modelling and measurements of normal and lateral stiffness for atomic force microscopy (AFM) are presented in this work. Important issues, such as element discretisation, stiffness calibration, and deflection angle are explored using the finite element (FE) model. Elements with various dimension ratios are investigated and comparisons with several mathematical models are reported to verify the accuracy of the model. Investigation of the deflection angle of a cantilever is also shown. Moreover, AFM force measurement experiments with conical and colloid probe tips are demonstrated. The relationships between force and displacement, required for stiffness measurement, in normal and lateral directions are acquired for the conical tip and the limitations of the colloid probe tip are highlighted.