ZnO has attracted much attention such as photocatalysts, sensors, piezoelectricity and etc. At present, an economical and rapid synthesis route based on the efficient microwave polyol process is used to synthesized metal-doped ZnO nanoclusters. Diethylene glycol has a property of high polarizability, and is an excellent microwave absorbing agent, thus leading to a high heating rate and a significantly shorter reaction time. In this study, metal-doped ZnO nanoclusters are obtained with different seed volumes, when zinc acetate dihydrate is used as a precursor, and metal acetate hydrate is used as a doped-metal and diethylene glycol is used as a solvent. The obtained metal-doped ZnO nanoclusters were characterized by FE-SEM, XRD, Raman and PSA.