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Programming Characteristics on Three-Dimensional NAND Flash Structure Using Edge Fringing Field Effect
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  • Programming Characteristics on Three-Dimensional NAND Flash Structure Using Edge Fringing Field Effect
  • Programming Characteristics on Three-Dimensional NAND Flash Structure Using Edge Fringing Field Effect
저자명
Yang. Hyung Jun,Song. Yun-Heub
간행물명
Journal of semiconductor technology and science
권/호정보
2014년|14권 5호|pp.537-542 (6 pages)
발행정보
대한전자공학회
파일정보
정기간행물|ENG|
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기타
이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

The three-dimensional (3-D) NAND flash structure with fully charge storage using edge fringing field effect is presented, and its programming characteristic is evaluated. We successfully confirmed that this structure using fringing field effect provides good program characteristics showing sufficient threshold voltage ($V_T$) margin by technology computer-aided design (TCAD) simulation. From the simulation results, we expect that program speed characteristics of proposed structure have competitive compared to other 3D NAND flash structure. Moreover, it is estimated that this structural feature using edge fringing field effect gives better design scalability compared to the conventional 3D NAND flash structures by scaling of the hole size for the vertical channel. As a result, the proposed structure is one of the candidates of Terabit 3D vertical NAND flash cell with lower bit cost and design scalability.