- 백색광 주사 간섭계의 측정 속도 개선을 위한 서브 샘플링 기법 연구
- ㆍ 저자명
- 천인범,주기남,Chyun. In-Bum,Joo. Ki-Nam
- ㆍ 간행물명
- 한국정밀공학회지
- ㆍ 권/호정보
- 2014년|31권 11호|pp.999-1006 (8 pages)
- ㆍ 발행정보
- 한국정밀공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
In this investigation, we explain the sub-sampling technique of white light scanning interferometry (WLSI) to improve the measurement speed. In addition to the previous work using Fourier domain analysis, several methods to extract the height from the correlogram of WLSI are described with the sub-sampling technique. Especially, Fourier-inverse Fourier transformation method adopting sub-sampling technique is proposed and the phase compensation technique is verified with simulation and experiments. The main advantage of sub-sampling is to speed up the measurements of WLSI but the precision such as repeatability is slightly poor. In case of measuring the sample which has high height step or difference, the proposed technique can be widely used to reduce the measurement time.