Surface enhanced Raman Scattering (SERS) has attracted attention because the technique enables detection of various chemicals, even down to single molecular scale. Among the diverse candidates for SERS substrates, Au nanoparticles are considered promising due to their fine optical properties, chemical stability and ease of surface modification. Therefore, the fabrication and optical characterization of gold particles on solid supports is highly desirable. Such structures have potential as SERS substrates because the localized surface plasmon resonance of gold nanoparticles is very sensitive to combined molecules and environments. In addition, it is well-known that the properties of Au nanoparticles are strongly dependent on their shape. In this work, arrays of shape-controlled Au nanoparticles were fabricated to exploit their enhanced and reproducible optical properties. First, shape-controlled Au nanoparticles were prepared via seed mediated solution-phase synthesis, including spheres, octahedra, and rhombic dodecahedra. Then, these shape-controlled Au nanoparticles were arranged on a PDMS substrate, which was nanopatterned using soft lithography of poly styrene particles. The Au nanoparticles were selectively located in a pattern of hexagonal spheres. In addition, the shape-controlled Au nanoparticles were arranged in various sizes of PDMS nanopatterns, which can be easily controlled by manipulating the size of polystyrene particles. Finally, the optical properties of the fabricated Au nanoparticle arrays were characterized by measuring surface enhanced Raman spectra with 4-nitrobenezenethiol.