PFCs(Perfluorocompounds) are global warming materials and should be treated in the semiconductor industry. Compared to carbon dioxide, the generation amount of PFCs is relatively small; however, the GWP (Global Warming Potential) of PFCs is very higher thus causing great contribution to the global warming. In this review paper the characteristics of the thermal plasma process for PFCs decomposition were described. Generally thermal plasma processing is applied to nanopowder production, toxic gases treatment, etc because of its high temperature, high activity, great quenching, etc. However, in this paper we only discuss the thermal decomposition of PFCs. Firstly thermodynamic analyses were performed to investigate the chemical routes of PFCs decomposition. As the result, the steam plasma is considered to be a powerful candidate for the safe PFCs decomposition. However, presently the steam plasma is under development; therefore, only the fundamental study can be performed presently. The advantages of thermal plasma processing for PFCs decomposition are high efficiency, large volume treatment, etc. For the combustion method, although the large volume treatment is possible, the decomposition efficiency is lower. For the low-temperature plasma method, the large volume treatment is not suitable.