In this study, a low temperature growth of high-quality carbon nanotubes on glass substrate using a local surface heating without heating damage to substrate was tried and characterized. The local joule heating was induced to only Ni/Ti metal film on glass substrate by applying voltage to the film. It was estimated that local surface joule heating method could heat the metal surface locally up to around 1200oC by voltage control. We could successfully obtain high-quality carbon nanotubes grown at 300oC by applying 125 V for joule heating as same as carbon nanotubes grown at 900oC.