Creep rate the elevated temperature is known to be controller by the softening process of microstructure especially in the solid solution alloys such as 125 Cr rotor steel. The change of structure is a decreasing process of the free energy of the state including stress, diffusivity of the material, and tmeperature. This study shows that diffusion coefficient, D of 12% Cr rotor steel at 953K with 74.8 MPa is 1.084~3.140*$10^{15}mm^2sec^1$ compared to $1.658*10^{24}mm^2sec^1$at 963K without stress. During creep, the growth of martensite laths accelerates the diffusion coefficient under stress due to incoherency of interface between carbides and matrix.