The $(Pb_{0.9}Ca_{0.1})TiO_3$[PCT] thin films have been deposited by sol-gel processing on Si-wafer and ITO glass substrates. The creak-free films have been obtained by rapid thermal annealing at $700^{circ}C$ for 10 minute and characterized by XRD, SEM and electrical measurements. Their tetragonality c/a was 1.041 and grain size was $0.15{sim}0.2{mu}m$. When the electrode system of sample was Au/PCT/ITO(MFM) and film thickness was $0.8{mu}m$, dielectric constant, dielectric loss and Curie temperature were about 149, 0.085 and $449^{circ}C$ at 10kHz, respectively. Spontaneous polarization $P_s$, remnant polarization $P_r$ and coercive field $E_c$ were about $5.29{mu}C/cm^2$, $4.15{mu}C/cm^2$ and 82kV/cm calculated by hysteresis loop.