- 레이저 어블레이션에 의한 $(Pb,La)TiO_3$ 박막의 제작
- ㆍ 저자명
- 박정흠,김준한,이상렬,박종우,박창엽,Park. Jeong-Heum,Kim. Joon-Han,Lee. Sang-Yeol,Park. Chong-Woo,Park. Chang-Yub
- ㆍ 간행물명
- 전기전자재료학회논문지
- ㆍ 권/호정보
- 1998년|11권 2호|pp.133-137 (5 pages)
- ㆍ 발행정보
- 한국전기전자재료학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
$(Pb_{0.72}La_{0.28})Ti_{0.93}O_3(PLT(28))$ thin films were fabricated by pulsed laser deposition. PLT films deposited on $Pt/Ti/SiO_2/Si$ at $600^{circ}C$ had a preferred orientation in (111) plane and at $550^{circ}C$ had a (100) preferred orientation. We found that (111) preferred oriented films had well grown normal to substrate surface. This PLT(28) thin films of $1{mu}m$ thickness had dielectric properties of ${varepsilon}_r$=1300, dielectric $loss{fallingdotseq}0.03 $. and had charge storage density of 10 [${mu}C/cm^2$] and leakage current density of less than $10^{-6}[A/cm^2]$ at 100[kV/cm]. These results indicated that the PLT(28) thin films fabricated by pulsed laser deposition are suitable for DRAM capacitor application.