microwave(2.45 GHz) was used as energy source in hydrothermal reaction to fabricate ultrafine BaTiO3 powder. Using microwave of 700 W, crytal BaTiO3 began to fom after 5 min in microwave-autoclave sys-tem. The crystallinity was not noticeably increased with increasing longer reaction time than 10 min. On the other hand in microwave-reflux system crytal BaTiO3 began to form after 15min and the crystallinity was not noticeably increased with increasing longer reaction time than 1hr,. In either case particle size dis-tribution was considerably uniform due to the effect of homogeneous heating by microwave. In addition mi-crowave heating gave an extremely small degree of particle agglomeration compared to electric heating. Av-erage sizes of as-synthesized powders were 30-60nm. Ba/Ti ratio in sol played an important role in det-ermining the particle size. It seems that excess barium forms different phases such as Ba(OH)2 which makes thin layer on the surface of BaTiO3 powder. This thin layer would inhibit the agglomeration of Ba-TiO3 powders and keep the small grain size. In microwave-autoclave system tetragonal-BaTiO3 was formed directly by the reaction of only 15 min. In the case of microwave-reflux system tetragonal-BaTiO3 was formed by driyng over 25$0^{circ}C$