- $alpha$-Fe$_2$O$_3$ 박막 센서의 환원성 가스감지특성
- ㆍ 저자명
- 이은태,장건익,이덕동
- ㆍ 간행물명
- 요업학회지
- ㆍ 권/호정보
- 1999년|36권 5호|pp.465-470 (6 pages)
- ㆍ 발행정보
- 한국세라믹학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
Sensing properties of $alpha$-Fe2O3 thin film to reducing gases such as CHx and CO were systematically examined after deposition on Al2O3 substrate by PECVD(Plasma Enhanced Chemical Vapor Deposition)technique. Microstructure of deposited $alpha$-Fe2O3 thin film showed the porous island structure. This specimen was annealed at 450, 550, $650^{circ}C$ to enhance the gas sensing properties and investigated in terms of CO and C4H10 concentration from 500ppm to 3,000 ppm at operating temperature of 35$0^{circ}C$ The gas sensitivity(%) to C4H10 measured at the operating temperature of 35$0^{circ}C$ was 98.24 (highest sensitivity) 69.51 to CO and 2% to CH4 respectviely.