In this paper, characteristics of ozone generation by using coil and SPCP + DC corona reactor was studied. The ceramic-based surface discharge electrode, which was first invented as a high-efficiency ozonizer, has been used as an experimental plasma chemical reactor.(Surface Induced Plasma Chemical Processing, SPCP.) The electrode, however, has a structural disadvantage that a highly energetic plasma region is localized near the electrode surface, which may make it impossible for higher efficiency to realize. In an attempt to overcome this advantage, we have developed a hybrid reactor which employs a corona discharge unit together with the surface discharge unit. Experimental results suggest that the efficiency of the ozone production rate is improved when positive corona discharge is added.