- 반도체 소자의 정전기 완화특성
- Characteristics of Electrostatic Attenuation in Semiconductor
- ㆍ 저자명
- 김두현,김상렬
- ㆍ 간행물명
- 한국산업안전학회지
- ㆍ 권/호정보
- 1999년|14권 3호|pp.69-77 (9 pages)
- ㆍ 발행정보
- 한국안전학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
As the use of automatic handling equipment for sensitive semiconductor devices is rapidly increased, manufacturers of electronic components and equipment need to be more alert to the problem of electrostatic discharges(ESD). Semiconductor devices such as IC, LSI, VLSI become a high density pattern of being more fragile by ESD phenomena. One of the most common causes of electrostatic damage is the direct transfer of electrostatic charge from the human body or a charged material to the electrostatic discharge sensitive devices. Accordingly, characteristics of electrostatic attenuation in domestic semiconductor devices is investigated to evaluate the ESD phenomina in the semiconductors in this paper. The required data are obtained by Static Honestmeter. Also The results in this paper can be used for the prevention of semiconductor failure by ESD.