$BaTIO_3$ thin films were prepared on (100) $BaTIO_3$ substrates by coating- pyrolysis process using metal-organic compounds of Ba and Ti. The amorphous films prefired at $450^{circ}C$were crystallized above $700^{circ}C$ under oxygen partial pressure of $2 imes 10^{-4}$. The lattice parameters of the perpendicular axis for the $BaTIO_3$ thin films heat-treated below $800^{circ}C$ were closer to a value of cubic $BaTIO_3$, whereas those above $800^{circ}C$ were closer to a value of tetragonal BaTiG. The results of XRD P scan and pole-figure analyses indicated that BaTiO, thin films have an epitaxial relationship with the $SrTiO_3$ substrates. The $BaTIO_3$thin films annealed at$800^{circ}C$ showed the surface with island-like grains about 0.4$mu extrm{m}$ and the cross section of 0.8 $mu extrm{m}$ thickness with granular grains.