In this paper, we proposed calibration techniques to improve measurement accuracy in the characteristic analysis system for semiconductor devices. Systematic errors can be reduced using proposed calibration techniques. Also, error current reduction procedures including leakage current and offset current are proposed to measure low-level current in pA level. Calibration parameters are calculated and stored by microprocessor using least-square fitting with measured sample data. During measurement time microprocessor corrects measured data using stored calibration parameters. Experimental results show that current measurement error above nA level is less than 0.02%. And they also show that current measurement in pA level can be performed with about 0.2% accuracy.