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Pt/AlGaN Schottky-Type UV Photodetector with 310nm Cutoff Wavelength
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  • Pt/AlGaN Schottky-Type UV Photodetector with 310nm Cutoff Wavelength
  • Pt/AlGaN Schottky-Type UV Photodetector with 310nm Cutoff Wavelength
저자명
김보균,김정규,박성종,이헌복,조헌익,이용현,한윤봉,이정희,함성호,Kim. Bo-Kyun,Kim. Jung-Kyu,Park. Sung-Jong,Lee. Heon-Bok,Cho. Hyun-Ick,Lee. Young-Hyun,Hahn.
간행물명
센서학회지
권/호정보
2003년|12권 2호|pp.66-71 (6 pages)
발행정보
한국센서학회
파일정보
정기간행물|ENG|
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기타
이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

Pt/AlGaN Schottky-type UV photodetectors were designed and fabricated. A low-temperature AlGaN interlayer buffer was grown between the AlGaN and GaN film in the diode structure epitaxy to obtain crack-free AlGaN active layers. A comparison was then made of the structural, electrical, and optical characteristics of two different diodes: one with an AlGaN($0.5;{mu}m$)/n+-GaN(2 nm) structure (type 1) and the other with an AlGaN($0.5;{mu}m$)/AlGaN interlayer($150;{AA}$)/n+-GaN($3;{mu}m$) structure(type 2). A crack-free AlGaN film was obtained by the insertion of a low-temperature AlGaN interlayer with an aluminum mole fraction of 26% into the $Al_xGa_{1-x}N$ layer. The fabricated Pt/$Al_{0.33}Ga_{0.67}N$ photodetector had a leakage current of 1 nA for the type 1 diode and $0.1;{mu}A$ for the type 2 diode at a reverse bias of -5 V. For the photoresponse measurement, the type 2 diode exhibited a cut-off wavelength of 300 nm, prominent responsivity of 0.15 A/W at 280 nm, and UV-visible extinction ratio of $1.5{ imes}10^4$. Accordingly, the Pt/$Al_{0.33}Ga_{0.67}N$ Schottky-type ultraviolet photodetector with an AlGaN interlayer exhibited superior electrical and optical characteristics and improved UV detecting properties.